Yes, arguments over semantics is at the very core of the debate over the Trinity Doctrine.
Trinity - History
Although there is much debate as to whether the beliefs of the Apostles were merely articulated and explained in the Trinitarian Creeds, or were corrupted and replaced with new beliefs, all scholars recognize that the Creeds themselves were created in reaction to disagreements over the nature of the Father, Son, and Holy Spirit. These controversies took some centuries to be resolved.
Of these controversies, the most significant developments were articulated in the first four centuries by the Church Fathers in reaction to Adoptionism, Sabellianism, and Arianism. Adoptionism was the belief that Jesus was an ordinary man, born of Joseph and Mary, who became the Christ and Son of God at his baptism. In 269, the Synods of Antioch condemned Paul of Samosata for his Adoptionist theology, and also condemned the term homoousios (ὁμοούσιος, "of the same being") in the sense he used it.
Sabellianism taught that the Father, the Son, and the Holy Spirit are essentially one and the same, the difference being simply verbal, describing different aspects or roles of a single being. For this view Sabellius was excommunicated for heresy in Rome c. 220.
In the fourth century, Arius, as traditionally understood, taught that the Father existed prior to the Son who was not, by nature, God but rather a changeable creature who was granted the dignity of becoming "Son of God". In 325, the Council of Nicaea adopted the Nicene Creed which described Christ as "God of God, Light of Light, very God of very God, begotten, not made, being of one substance with the Father". The creed used the term homoousios (of one substance) to define the relationship between the Father and the Son. After more than fifty years of debate, homoousios was recognised as the hallmark of orthodoxy, and was further developed into the formula of "three persons, one being".
The third Council of Sirmium, in 357, was the high point of Arianism. The Seventh Arian Confession (Second Sirmium Confession) held that both homoousios (of one substance) and homoiousios (of similar substance) were unbiblical and that the Father is greater than the Son. (This confession was later known as the Blasphemy of Sirmium)
But since many persons are disturbed by questions concerning what is called in Latin substantia, but in Greek ousia, that is, to make it understood more exactly, as to 'coessential,' or what is called, 'like-in-essence,' there ought to be no mention of any of these at all, nor exposition of them in the Church, for this reason and for this consideration, that in divine Scripture nothing is written about them, and that they are above men's knowledge and above men's understanding;
Athanasius (293–373), who was present at the Council as one of the Bishop of Alexandria's assistants, stated that the bishops were forced to use this terminology, which is not found in Scripture, because the biblical phrases that they would have preferred to use were claimed by the Arians to be capable of being interpreted in what the bishops considered to be a heretical sense. Moreover, the meanings of "ousia" and "hypostasis" overlapped then, so that "hypostasis" for some meant "essence" and for others "person".
The Confession of the Council of Nicaea said little about the Holy Spirit. The doctrine of the divinity and personality of the Holy Spirit was developed by Athanasius in the last decades of his life. He defended and refined the Nicene formula.[50] By the end of the 4th century, under the leadership of Basil of Caesarea, Gregory of Nyssa, and Gregory of Nazianzus (the Cappadocian Fathers), the doctrine had reached substantially its current form.